Materials Processing by Cluster Ion Beams: History, Technology, and Applications

Materials Processing by Cluster Ion Beams: History, Technology, and Applications in Ottawa, ON

Name: Materials Processing by Cluster Ion Beams: History, Technology, and Applications
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Materials Processing by Cluster Ion Beams: History, Technology, and Applications in Ottawa, ON

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04 Ion Beam Technology: Overview and History. History and Milestones of Cluster Beam Development. Development of Cluster Beam Sources for Solid Materials. Gas Cluster Ion Beam Equipment. Cluster Ion-Solid Surface Interaction Kinetics. Cluster Ion Beam Sputtering. Cluster Ion Implantation. Cluster Ion Beam-Assisted Deposition. Applications. Conclusions.

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