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Atomic Layer Deposition for Semiconductors by Cheol Seong Hwang, Hardcover | Indigo Chapters

From Cheol Seong Hwang

Current price: $248.50
Atomic Layer Deposition for Semiconductors by Cheol Seong Hwang, Hardcover | Indigo Chapters
Atomic Layer Deposition for Semiconductors by Cheol Seong Hwang, Hardcover | Indigo Chapters

From Cheol Seong Hwang

Atomic Layer Deposition for Semiconductors by Cheol Seong Hwang, Hardcover | Indigo Chapters

Current price: $248.50
Loading Inventory...

Size: 1 x 9.25 x 11.87

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Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device. | Atomic Layer Deposition for Semiconductors by Cheol Seong Hwang, Hardcover | Indigo Chapters

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