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Micro and Nano Fabrication by Hans H. Gatzen, Hardcover | Indigo Chapters
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Micro and Nano Fabrication by Hans H. Gatzen, Hardcover | Indigo Chapters
From Hans H. Gatzen
Current price: $189.95
From Hans H. Gatzen
Micro and Nano Fabrication by Hans H. Gatzen, Hardcover | Indigo Chapters
Current price: $189.95
Loading Inventory...
Size: 1 x 9.25 x 20.72
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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i. e., wafer planarization and bonding, as well as contamination control. | Micro and Nano Fabrication by Hans H. Gatzen, Hardcover | Indigo Chapters