For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i. e., wafer planarization and bonding, as well as contamination control. | Micro and Nano Fabrication by Hans H. Gatzen, Hardcover | Indigo Chapters