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Wafer Bonding by Marin Alexe, Hardcover | Indigo Chapters
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Wafer Bonding by Marin Alexe, Hardcover | Indigo Chapters
From Marin Alexe
Current price: $554.95
From Marin Alexe
Wafer Bonding by Marin Alexe, Hardcover | Indigo Chapters
Current price: $554.95
Loading Inventory...
Size: 1 x 9.25 x 2.28
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During the past decade direct wafer bonding has developed into a mature materials integration technology. This book presents state-of-the-art reviews of the most important applications of wafer bonding written by experts from industry and academia. The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information. | Wafer Bonding by Marin Alexe, Hardcover | Indigo Chapters